@article{d4fee7de998647d6a519c7b76d6d1b7c,
title = "Effect of Multi-fin with Independent LER on Intrinsic Statistical Variability Sources",
keywords = "FinFET, Line Edge Roughness (LER), microelectronics, multifin, nanotechnology, Very-Large-Scale Integration (VLSI)",
author = "Rathore, {Rituraj S.} and Srivastava, {Viranjay M.}",
note = "Publisher Copyright: {\textcopyright} 2023 by the authors. This is an open access article distributed under the Creative Commons Attribution License (CC BY-NC-ND 4.0), which permits use, distribution and reproduction in any medium, provided that the article is properly cited, the use is non-commercial and no modifications or adaptations are made.",
year = "2023",
month = sep,
doi = "10.18178/ijeetc.12.5.358-362",
language = "English",
volume = "12",
pages = "358--362",
journal = "International Journal of Electrical and Electronic Engineering and Telecommunications",
issn = "2319-2518",
publisher = "ETPub: Engineering and Technology Publishing",
number = "5",
}