Effect of Multi-fin with Independent LER on Intrinsic Statistical Variability Sources

Rituraj S. Rathore*, Viranjay M. Srivastava

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    Original languageEnglish
    Pages (from-to)358-362
    Number of pages5
    JournalInternational Journal of Electrical and Electronic Engineering and Telecommunications
    Volume12
    Issue number5
    DOIs
    Publication statusPublished (VoR) - Sept 2023

    Keywords

    • FinFET
    • Line Edge Roughness (LER)
    • microelectronics
    • multifin
    • nanotechnology
    • Very-Large-Scale Integration (VLSI)

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