Meso scale component manufacturing: A comparative analysis of non-lithography and lithography-based processes

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Journal of Micromechanics and Microengineering
DOIs	https://doi.org/10.1088/1361-6439/ac6b7d
Publication status	Published (VoR) - 1 Jun 2022

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@article{eabac96de3224d9aa0d176fcba9bd80a,

title = "Meso scale component manufacturing: A comparative analysis of non-lithography and lithography-based processes",

author = "Azfar Khalid and Yang Wei and Saleem, \{Muhammad Rizwan\} and Lughmani, \{Waqas Akbar\}",

year = "2022",

month = jun,

day = "1",

doi = "10.1088/1361-6439/ac6b7d",

language = "English",

journal = "Journal of Micromechanics and Microengineering",

}

TY - JOUR

T1 - Meso scale component manufacturing: A comparative analysis of non-lithography and lithography-based processes

AU - Khalid, Azfar

AU - Wei, Yang

AU - Saleem, Muhammad Rizwan

AU - Lughmani, Waqas Akbar

PY - 2022/6/1

Y1 - 2022/6/1

UR - https://doi.org/10.1088/1361-6439/ac6b7d

U2 - 10.1088/1361-6439/ac6b7d

DO - 10.1088/1361-6439/ac6b7d

M3 - Article

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

ER -