Micromachined silicon generator for harvesting power from vibrations

SP Beeby, MJ Tudor, E Koukharenko, NM White, T O'Donnell, Chitta Saha, S Kulkarni, S Roy

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    Abstract

    This paper describes the design, simulation and fabrication of an electromagnetic device for generating electrical energy from vibrations. A range of dimensions has been simulated using ANSYS in order to determine natural frequencies and material stresses. A 300µm wide paddle beam gives a natural frequency of 6.4 kHz for the mode of operation and induced stresses at maximum amplitudes are well within material limits. Ansoft's Maxwell 2D has been used to predict the voltages generated and an integrated electroplated coil of 71 turns produces 0.38V with no load. Devices are currently being fabricated and the process is described.
    Original languageEnglish
    Title of host publicationThe 4th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Kyoto, Japan, 28/11/04
    Publication statusPublished (VoR) - Nov 2004

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