Nanopositioning systems with piezoelectric actuators, current state and future perspective

Morteza Mohammadzaheri; Abdullah AlQallaf

doi:10.1166/sam.2017.3088

Nanopositioning systems with piezoelectric actuators, current state and future perspective

Morteza Mohammadzaheri^*, Abdullah AlQallaf

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

24 Citations (SciVal)

Original language	English
Pages (from-to)	1071-1080
Number of pages	10
Journal	Science of Advanced Materials
Volume	9
Issue number	7
DOIs	https://doi.org/10.1166/sam.2017.3088
Publication status	Published (VoR) - 2017

Keywords

Actuator
Control
Nanopositioning
Piezoelectric

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10.1166/sam.2017.3088

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title = "Nanopositioning systems with piezoelectric actuators, current state and future perspective",

keywords = "Actuator, Control, Nanopositioning, Piezoelectric",

author = "Morteza Mohammadzaheri and Abdullah AlQallaf",

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language = "English",

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AU - Mohammadzaheri, Morteza

AU - AlQallaf, Abdullah

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KW - Control

KW - Nanopositioning

KW - Piezoelectric

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VL - 9

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JO - Science of Advanced Materials

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Nanopositioning systems with piezoelectric actuators, current state and future perspective

Keywords

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