Nanopositioning systems with piezoelectric actuators, current state and future perspective

Morteza Mohammadzaheri*, Abdullah AlQallaf

*Corresponding author for this work

    Research output: Contribution to journalArticlepeer-review

    23 Citations (SciVal)
    Original languageEnglish
    Pages (from-to)1071-1080
    Number of pages10
    JournalScience of Advanced Materials
    Volume9
    Issue number7
    DOIs
    Publication statusPublished (VoR) - 2017

    Keywords

    • Actuator
    • Control
    • Nanopositioning
    • Piezoelectric

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