Nanopositioning systems with piezoelectric actuators, current state and future perspective

Morteza Mohammadzaheri; Abdullah AlQallaf

doi:10.1166/sam.2017.3088

Nanopositioning systems with piezoelectric actuators, current state and future perspective

Morteza Mohammadzaheri^*
, Abdullah AlQallaf

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

28 Citations (SciVal)

Original language	English
Pages (from-to)	1071-1080
Number of pages	10
Journal	Science of Advanced Materials
Volume	9
Issue number	7
DOIs	https://doi.org/10.1166/sam.2017.3088
Publication status	Published (VoR) - 2017

Keywords

Actuator
Control
Nanopositioning
Piezoelectric

Access to Document

10.1166/sam.2017.3088

Cite this

@article{7511263c47ac4ff6bb8669a3c1c571f5,

title = "Nanopositioning systems with piezoelectric actuators, current state and future perspective",

keywords = "Actuator, Control, Nanopositioning, Piezoelectric",

author = "Morteza Mohammadzaheri and Abdullah AlQallaf",

note = "Publisher Copyright: {\textcopyright} 2017 by American Scientific Publishers.",

year = "2017",

doi = "10.1166/sam.2017.3088",

language = "English",

volume = "9",

pages = "1071--1080",

journal = "Science of Advanced Materials",

issn = "1947-2935",

publisher = "American Scientific Publishers",

number = "7",

}

TY - JOUR

T1 - Nanopositioning systems with piezoelectric actuators, current state and future perspective

AU - Mohammadzaheri, Morteza

AU - AlQallaf, Abdullah

PY - 2017

Y1 - 2017

KW - Actuator

KW - Control

KW - Nanopositioning

KW - Piezoelectric

UR - https://www.scopus.com/pages/publications/85019253810

UR - https://www.scopus.com/pages/publications/85019253810#tab=citedBy

U2 - 10.1166/sam.2017.3088

DO - 10.1166/sam.2017.3088

M3 - Article

AN - SCOPUS:85019253810

SN - 1947-2935

VL - 9

SP - 1071

EP - 1080

JO - Science of Advanced Materials

JF - Science of Advanced Materials

IS - 7

ER -

Nanopositioning systems with piezoelectric actuators, current state and future perspective

Keywords

Access to Document

Other files and links

Fingerprint

Cite this