Nanopositioning systems with piezoelectric actuators, current state and future perspective

Morteza Mohammadzaheri; Abdullah AlQallaf

doi:10.1166/sam.2017.3088

Nanopositioning systems with piezoelectric actuators, current state and future perspective

Morteza Mohammadzaheri^*
, Abdullah AlQallaf

^*Corresponding author for this work

Sultan Qaboos University
Kuwait University

Research output: Contribution to journal › Article › peer-review

29 Citations (SciVal)

Original language	English
Pages (from-to)	1071-1080
Number of pages	10
Journal	Science of Advanced Materials
Volume	9
Issue number	7
DOIs	https://doi.org/10.1166/sam.2017.3088
Publication status	Published (VoR) - 2017

Keywords

Actuator
Control
Nanopositioning
Piezoelectric

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10.1166/sam.2017.3088

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title = "Nanopositioning systems with piezoelectric actuators, current state and future perspective",

keywords = "Actuator, Control, Nanopositioning, Piezoelectric",

author = "Morteza Mohammadzaheri and Abdullah AlQallaf",

note = "Publisher Copyright: {\textcopyright} 2017 by American Scientific Publishers.",

year = "2017",

doi = "10.1166/sam.2017.3088",

language = "English",

volume = "9",

pages = "1071--1080",

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T1 - Nanopositioning systems with piezoelectric actuators, current state and future perspective

AU - Mohammadzaheri, Morteza

AU - AlQallaf, Abdullah

PY - 2017

Y1 - 2017

KW - Actuator

KW - Control

KW - Nanopositioning

KW - Piezoelectric

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UR - https://www.scopus.com/pages/publications/85019253810#tab=citedBy

U2 - 10.1166/sam.2017.3088

DO - 10.1166/sam.2017.3088

M3 - Article

AN - SCOPUS:85019253810

SN - 1947-2935

VL - 9

SP - 1071

EP - 1080

JO - Science of Advanced Materials

JF - Science of Advanced Materials

IS - 7

ER -

Nanopositioning systems with piezoelectric actuators, current state and future perspective

Keywords

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